• XDS Dry Scroll Pump
  • XDS 건식 스크롤 펌프, Edwards

■ 공정가스와 베어링 윤활유 사이를 분리하는 베어링 쉴드로 베어링 내구성을 강화함
- 클린 진공을 보장
- 공정가스로부터의 윤활유 오염 가능성을 배제
■ 스마트 모터 드라이브로 일관된 성능과 펌프 과부하 보호 및 원격 시작/정지 기능 제공
■ 유지, 보수 비용이 낮음
■ C Type (Corrosion resistant) 제공 : Chemraz® 내부 밸브와 스테인리스 스틸 피팅
■ Enhanced Type : 20% 낮은 Peak Power 로 Pumping Speed 가 25% 더 높음 (대형 부피에 적합)
■ Edwards




  •   Standard & Enhanced
    상세 규격 표
    Cat. No Model Peak Pumping Speed Ultimate Vacuum
    P06-121-641 XDS35i 35 ㎥/h 0.01 mbar
    P06-121-644 XDS35iE 0.03 mbar
    P06-121-651 XDS46i 40 ㎥/h 0.05 mbar
    Corrosion Resistant / 내부식성
    상세 규격 표
    Cat. No Model Peak Pumping Speed Ultimate Vacuum
    P06-121-647 XDS35iC 35 ㎥/h 0.01 mbar
    P06-121-654 XDS46iC 40 ㎥/h 0.05 mbar

     

    Cat. No P06-121-641 P06-121-644 P06-121-651
    Model XDS35i XDS35iE XDS46i
    Cat. No P06-121-647   P06-121-654
    Model XDS35iC   XDS46iC
    Peak Pumping Speed 35 ㎥/h 40 ㎥/h
    Ultimate Vacuum 0.01 mbar 0.03 mbar 0.05 mbar
    Ultimate Vacuum with gas ballast 1 0.02 mbar 0.02 mbar 0.08 mbar
    Ultimate Vacuum with gas ballast 2 < 10 mbar
    Max Inlet Pressure for Water Vaper 35 mbar 40 mbar
    Water vapour handling capacity GBII 240 g/h
    Maximum continuous inlet pressure 40 mbar 1000 mbar 40 mbar
    Maximum gas ballast/purge pressure 0.5 bar gauge
    Voltage Input / Frequancy 100~127, 200~240 (+/-10%) / 5-/60 Hz
    Nominal rotation speed 1750 rpm
    Power at ultimate 440 W 380 W
    Motor Power 520 W
    Power Connector IEC EN60320 C19
    Recommned Fuse, 230V (115V) 16A (20A)
    Weight 48 kg
    Inlet / Exhaust Flange NW40 / NW25
    Noise Level at ultimate 57 dB 55.4 dB
    Noise level with acoustic enclosure 48 dB 46.4 dB
    Vibration at Inlet Flange < 4.5 mm/s
    Leak Tightness (static) < 1x10-6 mbar
    Operating Temperature Range 5 ~ 40 ℃
    Spare & Accessories
    Cat. No Model 규격
    P06-121-681 ED-A24801408 Vibration isolator for XDS
    P06-121-684 ED-A50597806 Inlet/outlet filter for XDS/NW40
    P06-121-687 ED-A50597001 Exhaust silencer for XDS35i
    P06-121-690 ED-A73001801 Tip seal & exhaust service kit for XDS35i
    P06-121-693 ED-A73101801 Tip-seal kit for XDS46i
    P06-121-696 ED-A73001814 Exhaust valve kit (Chemraz®) for XDS35iC
    P06-121-251 ED-A50506003 Power Cable for 340L 이상