- FOUP, 12inch Process Carrier, 25 slots
- 12인치 웨이퍼 프로세스 케리어
■ SEMI / FIMS Compliant
■ Front Opening Unified Pod (FOUP)
■ 반도체 생산업체 공정 라인에서 사용되는 캐리어 박스임
■ Automatic opening and closing
■ Ultrapure, low outgassing materials protect wafers
■ ESD처리된 12inch Process Carrier
■ 강력한 웨이퍼 고정으로 입자 생성 감소
■ 도어 분해 없이 청소 가능
■ 이송 과정에서 발생하는 충격 및 진동에 강하도록 설계됨
■ EPAK
-
Cat.No. Model Description Wafer W01-261-420 L12-FOUP Process Carrier (FOUP) 12 inch Cat.No. W01-261-420 Model L12-FOUP Carrier Type Front Opening Unified Pod (FOUP) Wafer Size 12 inch (300mm) Wafer Capacity 25 Wafer Spacing 10mm (±0.5mm Positional tolerance wafer to wafer, non-cumulative) Weight 4.6 kg (Empty) / about 7.8 kg (Full Loaded) Size Included Handler & Robotic Flange w420×d342×h338 mm Excluded Handler & Robotic Flange w388×d342×h332 mm * All datum established relative to kinematic coupling per SEMI
* Fist Wafer Position - 44mm nomial relative to horizontal datum plane