.jpg)
.jpg)
.jpg)
.jpg)
- Vacuum Devices
- 진공 호환 장치
■ Vacuum Devices(진공 호환 장치)는 2가지 제품군으로 분류
1. High Vacuum Devices
2. Low Vacuum Devices
■ 제품별 주요 특징은 하단 설명 참조
1. High Vacuum Devices
■ Vacuum compatible to 10-6 torr
■ 25 ~ 600 mm travel
■ 10 ~100 kg load capacity
■ Up to100 ~ 205 mm/s speed and up to 35 ~ 100 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
2. Low Vacuum Devices
■ Vacuum compatible to 10-3 torr
■ 25 ~ 600 mm travel
■ 10 ~100 kg load capacity
■ Up to100 ~ 205 mm/s speed and up to 35 ~ 100 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
■ Vacuum compatible to 10-6 torr
■ 25 ~ 600 mm travel
■ 10 ~100 kg load capacity
■ Up to100 ~ 205 mm/s speed and up to 35 ~ 100 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
2. Low Vacuum Devices
■ Vacuum compatible to 10-3 torr
■ 25 ~ 600 mm travel
■ 10 ~100 kg load capacity
■ Up to100 ~ 205 mm/s speed and up to 35 ~ 100 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
-
- High Vacuum Devices
Cat. No. Model Description M01-680-530 X-LRQ075AL-SV2-KX14P High vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed M01-680-535 X-LRQ150AL-SV2-KX14P High vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed M01-680-540 X-LRQ300AL-SV2-KX14P High vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed M01-680-545 X-LRQ450AL-SV2-KX14P High vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed M01-680-550 X-LRQ600AL-SV2-KX14P High vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed M01-680-555 X-LSM025A-SV2-KX14P High vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed M01-680-560 X-LSM050A-SV2-KX14P High vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed M01-680-565 X-LSM100A-SV2-KX14P High vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed M01-680-570 X-LSM150A-SV2-KX14P High vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed M01-680-575 X-LSM200A-SV2-KX14P High vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed M01-680-580 T-NA08A25-SV2-KT03X06P High vacuum linear actuator, 25 mm travel, RS-232 M01-680-585 T-NA08A50-SV2-KT03X06P High vacuum linear actuator, 50 mm travel, RS-232 - High Vacuum Devices Specification
Specification 
.jpg)
Value Value Value Model X-LRQ-SV2 Series X-LSM-SV2 Series T-NA-SV2 Series Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers Built-in Controller Yes Yes Yes Repeatability < 2.5 µm <1 ~4 um < 1 µm Communication Interface RS-232 RS-232 RS-232 Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary Maximum Centered Load 1000 N 100 N 46 N Maximum Cantilever Load 3000 N-cm 300 N-cm Guide Type Recirculating Ball Linear Guide Needle roller bearing Maximum Current Draw 1200 mA 350 mA 350 mA Power Supply 24-48 VDC 24-48 VDC 12-16 VDC Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P Motor Steps Per Rev 200 200 200 Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor Manual Control No No No Axes of Motion 1 1 1 LED Indicators Yes Yes Yes, Bi-colour Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8" shank, or M3 screws Vacuum Compatible High vacuum (10-6 Torr) High vacuum (10-6 Torr) High vacuum (10-6 Torr) Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C RoHS Compliant Yes Yes Yes CE Compliant Yes Yes Yes Tranvel Range 75 ~ 600 mm 25.4 ~ 203.2 mm 25.4 or 50.8 mm Accuracy 15 ~ 150 um 8 ~ 61 um 15 or 30 um Maximum Speed 35 ~ 205 mm/s 24 ~ 100 mm/s 8 mm/s Peak Thrust 60 ~100 N 15 ~35 N 46 N - Low Vacuum Devices
Cat. No. Model Description M01-680-600 X-LRQ075AL-SV1-KX14P Low vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed M01-680-605 X-LRQ150AL-SV1-KX14P Low vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed M01-680-610 X-LRQ300AL-SV1-KX14P Low vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed M01-680-615 X-LRQ450AL-SV1-KX14P Low vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed M01-680-620 X-LRQ600AL-SV1-KX14P Low vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed M01-680-625 X-LSM025A-SV1-KX14P Low vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed M01-680-630 X-LSM050A-SV1-KX14P Low vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed M01-680-635 X-LSM100A-SV1-KX14P Low vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed M01-680-640 X-LSM150A-SV1-KX14P Low vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed M01-680-645 X-LSM200A-SV1-KX14P Low vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed M01-680-650 T-NA08A25-SV1-KT03X06P Low vacuum linear actuator, 25 mm travel, RS-232 M01-680-655 T-NA08A50-SV1-KT03X06P Low vacuum linear actuator, 50 mm travel, RS-232 - Low Vacuum Devices Specification
Specification .jpg)
.jpg)
.jpg)
Value Value Value Model X-LRQ-SV1 Series X-LSM-SV1 Series T-NA-SV1 Series Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers Built-in Controller Yes Yes Yes Repeatability < 2.5 µm <1 ~4 um < 1 µm Communication Interface RS-232 RS-232 RS-232 Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary Maximum Centered Load 1000 N 100 N 46 N Maximum Cantilever Load 3000 N-cm 300 N-cm Guide Type Recirculating Ball Linear Guide Needle roller bearing Maximum Current Draw 1200 mA 350 mA 350 mA Power Supply 24-48 VDC 24-48 VDC 12-16 VDC Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P Motor Steps Per Rev 200 200 200 Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor Manual Control No No No Axes of Motion 1 1 1 LED Indicators Yes Yes Yes, Bi-colour Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8" shank, or M3 screws Vacuum Compatible High vacuum (10-3 Torr) High vacuum (10-3 Torr) High vacuum (10-3 Torr) Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C RoHS Compliant Yes Yes Yes CE Compliant Yes Yes Yes Tranvel Range 75 ~ 600 mm 25.4 ~ 203.2 mm 25.4 or 50.8 mm Accuracy 15 ~ 150 um 8 ~ 61 um 15 or 30 um Maximum Speed 35 ~ 205 mm/s 24 ~ 100 mm/s 8 mm/s Peak Thrust 60 ~100 N 15 ~35 N 46 N