- Linear Stage
- 선형 이송장치
■ Linear Stage(선형 이송장치)은 4가지의 제품군으로 분류
1. Motorized Stage with Built-in controller and Linear encoders
2. Motorized Stage with Built-in controller and Motor encoders
3. Motorized with Built-in controller
4. Motorized Stage
■ 제품별 주요 특징은 하단 설명 참조
1. Motorized Stage with Built-in controller and Linear encoders
■ 75 ~ 600 mm travel
■ Up to 13 µm accuracy over 600 mm travel
■ 50 ~ 100 kg load capacity
■ Up to 205 mm/s speed and up to 300 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Integrated linear encoders with 50 nm resolution provide slip/stall detection and position correction
■ Inline and parallel drive configurations
■ Custom versions available
2. Motorized Stage with Built-in controller and Motor encoders
■ 75, 150, 300, 450, 600 mm travel
■ 20 ~ 100 kg load capacity
■ Up to 840 mm/s speed and up to 300 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Integrated, 500 CPR, motor mounted encoder provides slip/stall detection and recovery
■ Inline and parallel drive configurations
■ Ball screw and lead screw configurations
■ Custom versions available
3. Motorized with Built-in controller
■ 25, 50, 100, 150, 200 mm travel
■ 3 ~ 50 kg load capacity
■ Up to 104 mm/s speed and up to 55 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
4. Motorized Stage
■ 10 ~ 1,550 mm travel
■ 3.5 ~100 kg load capacity
■ Up to 10 ~ 420 mm/s speed
■ Can be mounted in XY and XYZ configurations
■ Designed for use with a X-MCB1 Series stepper motor controller or any 2-phase stepper motor controller
■ Custom versions available
■ 75 ~ 600 mm travel
■ Up to 13 µm accuracy over 600 mm travel
■ 50 ~ 100 kg load capacity
■ Up to 205 mm/s speed and up to 300 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Integrated linear encoders with 50 nm resolution provide slip/stall detection and position correction
■ Inline and parallel drive configurations
■ Custom versions available
2. Motorized Stage with Built-in controller and Motor encoders
■ 75, 150, 300, 450, 600 mm travel
■ 20 ~ 100 kg load capacity
■ Up to 840 mm/s speed and up to 300 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Integrated, 500 CPR, motor mounted encoder provides slip/stall detection and recovery
■ Inline and parallel drive configurations
■ Ball screw and lead screw configurations
■ Custom versions available
3. Motorized with Built-in controller
■ 25, 50, 100, 150, 200 mm travel
■ 3 ~ 50 kg load capacity
■ Up to 104 mm/s speed and up to 55 N thrust
■ Built-in controller; daisy-chains with other Zaber products
■ Custom versions available
4. Motorized Stage
■ 10 ~ 1,550 mm travel
■ 3.5 ~100 kg load capacity
■ Up to 10 ~ 420 mm/s speed
■ Can be mounted in XY and XYZ configurations
■ Designed for use with a X-MCB1 Series stepper motor controller or any 2-phase stepper motor controller
■ Custom versions available
-
- Motorized Stage with Built-in controller and Linear encoders
Cat. No. Model Description M01-680-005 X-LRQ075AL-DE51-KX14C Motorized, lead-screw driven, linear stage, 75 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-010 X-LRQ150AL-DE51-KX14C Motorized, lead-screw driven, linear stage, 150 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-015 X-LRQ300AL-DE51-KX14C Motorized, lead-screw driven, linear stage, 300 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-020 X-LRQ450AL-DE51-KX14C Motorized, lead-screw driven, linear stage, 450 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-025 X-LRQ600AL-DE51-KX14C Motorized, lead-screw driven, linear stage, 600 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-030 X-LRQ075AL-DE51C-KX14C Motorized, lead-screw driven, covered linear stage, linear stage, 75 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-035 X-LRQ150AL-DE51C-KX14C Motorized, lead-screw driven, covered linear stage, linear stage, 150 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-040 X-LRQ300AL-DE51C-KX14C Motorized, lead-screw driven, covered linear stage, linear stage, 300 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-045 X-LRQ450AL-DE51C-KX14C Motorized, lead-screw driven, covered linear stage, linear stage, 450 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-050 X-LRQ600AL-DE51C-KX14C Motorized, lead-screw driven, covered linear stage, linear stage, 600 mm travel, integrated linear encoder and controller, fine resolution, low speed, inline drive M01-680-055 X-LRM100A-DE51-KX14A Motorized linear stage, integrated controller and linear encoder, 100 mm travel, fine resolution M01-680-060 X-LRM150A-DE51-KX14A Motorized linear stage, integrated controller and linear encoder, 150 mm travel, fine resolution M01-680-065 X-LRM200A-DE51-KX14A Motorized linear stage, integrated controller and linear encoder, 200 mm travel, fine resolution - Motorized Stage with Built-in controller and Linear encoders Specification
Specification Value Value Value Model X-LRQ-DE series X-LRQ-DEC series X-LRM-DE series Feature High precision stages with built-in controllers and linear encoders High precision stages with built-in controllers and linear encoders with dust cover Miniature, steel, motorized linear stages with built-in controllers and linear encoders. Built-in Controller Yes Yes Yes Encoder Type Linear quadrature encoder Linear quadrature encoder Linear quadrature encoder Encoder Resolution 50 nm 50 nm Communication Interface RS-232 RS-232 RS-232, USB 2.0 Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Maximum Centered Load 1000 N 1000 N 500 N Maximum Cantilever Load 3000 N-cm 3000 N-cm 1500 N-cm Guide Type Recirculating Ball Linear Guide Recirculating Ball Linear Guide Recirculating ball bearing Maximum Current Draw 1200 mA 1200 mA 350 mA Power Supply 24-48 VDC 24-48 VDC 24-48 VDC Power Plug 2-pin screw terminal 2-pin screw terminal 2-pin Screw Terminal Motor Steps Per Rev 200 200 200 Motor Type Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Motor Rated Current 2300 mA/phase 2300 mA/phase 600 mA/phase Inductance 2.8 mH/phase 2.8 mH/phase 3.5 mH/phase Default Resolution 1/64 of a step 1/64 of a step 1/64 of a step Data Cable Connection Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Limit or Home Sensing Magnetic home sensor Magnetic home sensor Magnetic hall sensor Manual Control Indexed knob with push switch Indexed knob with push switch Yes Axes of Motion 1 1 LED Indicators Yes Yes Yes Mounting Interface M6 and M3 threaded holes M6 and M3 threaded holes M6 and M4 threaded holes Vacuum Compatible No No No Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 1 to 50 degrees C RoHS Compliant Yes Yes Yes CE Compliant Yes Yes Yes Tranvel Range 75 ~ 600 mm 75 ~ 600 mm 100 ~200 nm Accuracy 13 ~ 15 um 13 ~ 15 um 15 um Maximum Speed 40 ~ 205 mm/s 40 ~ 205 mm/s 25 ~ 100 mm/s Maximum Continuous Thrust 100 ~ 200 N 100 ~ 200 N 25 N - Motorized Stage with Built-in controller and Motor encoders
Cat. No. Model Description M01-680-090 X-LRQ075AL-E01-KX14C Motorized, lead-screw driven, linear stage, 75 mm travel, integrated motor encoder and controller, fine resolution, low speed, inline drive M01-680-095 X-LRQ150AL-E01-KX14C Motorized, lead-screw driven, linear stage, 150 mm travel, integrated motor encoder and controller, fine resolution, low speed, inline drive M01-680-100 X-LRQ300AL-E01-KX14C Motorized, lead-screw driven, linear stage, 300 mm travel, integrated motor encoder and controller, fine resolution, low speed, inline drive M01-680-105 X-LRQ450AL-E01-KX14C Motorized, lead-screw driven, linear stage, 450 mm travel, integrated motor encoder and controller, fine resolution, low speed, inline drive M01-680-110 X-LRQ600AL-E01-KX14C Motorized, lead-screw driven, linear stage, 600 mm travel, integrated motor encoder and controller, fine resolution, low speed, inline drive M01-680-115 X-LSQ075A-E01-KX14C Motorized linear stage, integrated motor encoder and controller, 75 mm travel, fine resolution, low speed M01-680-120 X-LSQ150A-E01-KX14C Motorized linear stage, integrated motor encoder and controller, 150 mm travel, fine resolution, low speed M01-680-125 X-LSQ300A-E01-KX14C Motorized linear stage, integrated motor encoder and controller, 300 mm travel, fine resolution, low speed M01-680-130 X-LSQ450A-E01-KX14C Motorized linear stage, integrated motor encoder and controller, 450 mm travel, fine resolution, low speed M01-680-135 X-LSQ600A-E01-KX14C Motorized linear stage, integrated motor encoder and controller, 600 mm travel, fine resolution, low speed M01-680-140 X-BLQ0070-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 70 mm travel M01-680-145 X-BLQ0295-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 295 mm travel M01-680-150 X-BLQ0595-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 595 mm travel M01-680-155 X-BLQ1495-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 1495 mm travel M01-680-160 X-BLQ2095-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 2095 mm travel M01-680-165 X-BLQ3000-E01-KX14C-SN2 Motorized, belt-driven, linear stage, integrated motor encoder and controller, 3000 mm travel M01-680-170 X-LRM025A-E03-KX14A Motorized linear stage, integrated controller and motor encoder, 25 mm travel, fine resolution M01-680-175 X-LRM050A-E03-KX14A Motorized linear stage, integrated controller and motor encoder, 50 mm travel, fine resolution M01-680-180 X-LRM100A-E03-KX14A Motorized linear stage, integrated controller and motor encoder, 100 mm travel, fine resolution M01-680-185 X-LRM150A-E03-KX14A Motorized linear stage, integrated controller and motor encoder, 150 mm travel, fine resolution M01-680-190 X-LRM200A-E03-KX14A Motorized linear stage, integrated controller and motor encoder, 200 mm travel, fine resolution M01-680-195 X-LSM025A-E03-KX14A Motorized linear stage, 25 mm travel, integrated motor encoder and controller, plus manual control M01-680-200 X-LSM050A-E03-KX14A Motorized linear stage, 50 mm travel, integrated motor encoder and controller, plus manual control M01-680-205 X-LSM100A-E03-KX14A Motorized linear stage, 100 mm travel, integrated motor encoder and controller, plus manual control M01-680-210 X-LSM150A-E03-KX14A Motorized linear stage, 150 mm travel, integrated motor encoder and controller, plus manual control M01-680-215 X-LSM200A-E03-KX14A Motorized linear stage, 200 mm travel, integrated motor encoder and controller, plus manual control - Motorized Stage with Built-in controller and Motor encoders Specification
Specification Value Value Value Value Value Model X-LRQ-E series X-LSQ-E series X-BLQ-E sereis X-LRM-E Series X-LSM-E Series Feature Closed-loop stages with built-in stepper motors, motor encoders, and controllers Closed-loop stages with built-in stepper motors, motor encoders, and controllers Closed-loop, belt-driven linear stages with built-in stepper motors, motor encoders, and controllers Miniature, steel, motorized linear stages with built-in controllers and motor encoders Miniature motorized linear stages with built-in controllers Built-in Controller Yes Yes Yes Yes Yes Encoder Resolution 500 CPR 500 CPR 500 CPR 200 CPR 200 CPR Encoder Type Motor mounted rotary quadrature encoder Motor mounted rotary quadrature encoder Motor mounted rotary quadrature encoder Motor mounted rotary quadrature encoder Motor Mounted Rotary Quadrature Encoder Communication Interface RS-232 RS-232 RS-232 RS-232, USB 2.0 RS-232 Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Maximum Centered Load 1000 N 200 N 200 N 500 N 100 N Maximum Cantilever Load 3000 N-cm 800 N-cm 600 N-cm 1500 N-cm 300 N-cm Guide Type Recirculating Ball Linear Guide Roller bearing Roller bearing Recirculating ball bearing Needle roller bearing Maximum Current Draw 1200 mA 810 mA 1100 mA 350 mA 350 mA Power Supply 24-48 VDC 24-48 VDC 24-48 VDC 24-48 VDC 24-48 VDC Power Plug 2-pin screw terminal 2-pin Screw Terminal 53.97 mm 2-pin Screw Terminal 2-pin Screw Terminal Motor Steps Per Rev 200 200 200 200 200 Motor Type Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Motor Rated Current 2300 mA/phase 1250 mA/phase 1250 mA/phase 600 mA/phase 600 mA/phase Inductance 2.8 mH/phase 2.8 mH/phase 2.8 mH/phase 3.5 mH/phase 3.5 mH/phase Default Resolution 1/64 of a step 1/64 of a step 1/64 of a step 1/64 of a step 1/64 of a step Data Cable Connection Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Limit or Home Sensing Magnetic home sensor Magnetic home sensor Magnetic home sensor Magnetic hall sensor Magnetic hall sensor Manual Control Indexed knob with push switch Indexed knob with push switch Indexed knob with push switch Indexed knob with push switch Indexed knob with push switch Mounting Interface M6 and M3 threaded holes M6 threaded holes and 8-32 threaded holes M6 threaded holes and 8-32 threaded holes M3 and M6 threaded holes M3 and M6 threaded holes and M4 threaded centre hole Vacuum Compatible No No No No No Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C Stage Parallelism < 100 µm < 100 µm < 10 µm < 25 µm RoHS Compliant Yes Yes Yes Yes Yes CE Compliant Yes Yes Yes Yes Yes Tranvel Range 75 ~ 600 mm 75 ~ 600 mm 70 ~ 3,000 mm 25 ~ 200 mm 25.4 ~ 203.2 mm Accuracy 15 ~ 150 um 15 ~ 150 um 200 ~ 3,000 um 8 ~60 um 8 ~ 61 um Maximum Speed 40 ~ 840 mm/s 42 ~ 1,000 mm/s 1,100 ~ 2,000 mm/s 25 ~ 100 mm/s 26 ~ 104 mm/s Maximum Continuous Thrust 25 ~ 200 N 18 ~ 100 N 20 N 25 N 25 N - Motorized with Built-in controller
Cat. No. Model Description M01-680-240 X-LSQ075A-KX14C Motorized linear stage, integrated controller, 75 mm travel, fine resolution, low speed M01-680-245 X-LSQ150A-KX14C Motorized linear stage, integrated controller, 150 mm travel, fine resolution, low speed M01-680-250 X-LSQ300A-KX14C Motorized linear stage, integrated controller, 300 mm travel, fine resolution, low speed M01-680-255 X-LSQ450A-KX14C Motorized linear stage, integrated controller, 450 mm travel, fine resolution, low speed M01-680-260 X-LSQ600A-KX14C Motorized linear stage, integrated controller, 600 mm travel, fine resolution, low speed M01-680-265 X-LRM025A-KX14A Motorized linear stage, integrated controller, 25 mm travel, fine resolution M01-680-270 X-LRM050A-KX14A Motorized linear stage, integrated controller, 50 mm travel, fine resolution M01-680-275 X-LRM100A-KX14A Motorized linear stage, integrated controller, 100 mm travel, fine resolution M01-680-280 X-LRM150A-KX14A Motorized linear stage, integrated controller, 150 mm travel, fine resolution M01-680-285 X-LRM200A-KX14A Motorized linear stage, integrated controller, 200 mm travel, fine resolution M01-680-290 X-LSM025A-KX14A Motorized linear stage, 25 mm travel, integrated controller, plus manual control M01-680-295 X-LSM050A-KX14A Motorized linear stage, 50 mm travel, integrated controller, plus manual control M01-680-300 X-LSM100A-KX14A Motorized linear stage, 100 mm travel, integrated controller, plus manual control M01-680-305 X-LSM150A-KX14A Motorized linear stage, 150 mm travel, integrated controller, plus manual control M01-680-310 X-LSM200A-KX14A Motorized linear stage, 200 mm travel, integrated controller, plus manual control M01-680-315 X-LHM025A-KX14A Motorized linear stage, 25 mm travel, integrated controller, plus manual control M01-680-320 X-LHM050A-KX14A Motorized linear stage, 50 mm travel, integrated controller, plus manual control M01-680-325 X-LHM100A-KX14A Motorized linear stage, 100 mm travel, integrated controller, plus manual control M01-680-330 X-LHM150A-KX14A Motorized linear stage, 150 mm travel, integrated controller, plus manual control M01-680-335 X-LHM200A-KX14A Motorized linear stage, 200 mm travel, integrated controller, plus manual control - Motorized with Built-in controller Specification
Specification Value Value Value Value Model X-LSQ series X-LRM series X-LSM series X-LHM series Feature Motorized linear stages with built-in controllers Miniature, steel, motorized linear stages with built-in controllers Miniature motorized linear stages with built-in controllers Motorized linear stages with built-in controllers Built-in Controller Yes Yes Yes Yes Encoder Type None None None None Communication Interface RS-232 RS-232, USB 2.0 RS-232 RS-232 Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Maximum Centered Load 200 N 500 N 100 N 30 N Maximum Cantilever Load 800 N-cm 1500 N-cm 300 N-cm 50 N-cm Guide Type Roller bearing Recirculating ball bearing Needle roller bearing Plain bearing Vertical Runout < 13 µm < 8 µm < 8 µm Horizontal Runout < 13 µm < 12 µm < 12 µm Maximum Current Draw 810 mA 350 mA 350 mA 350 mA Power Supply 24-48 VDC 24-48 VDC 24-48 VDC 24-48 VDC Power Plug 2-pin Screw Terminal 2-pin Screw Terminal 2-pin Screw Terminal 2-pin Screw Terminal Motor Steps Per Rev 200 200 200 200 Motor Type Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Motor Rated Current 1250 mA/phase 600 mA/phase 600 mA/phase 600 mA/phase Inductance 2.8 mH/phase 3.5 mH/phase 3.5 mH/phase 3.5 mH/phase Default Resolution 1/64 of a step 1/64 of a step 1/64 of a step 1/64 of a step Data Cable Connection Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Locking 4-pin M8 Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw Lead screw Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor Magnetic hall sensor Manual Control Indexed knob with push switch Yes Yes Mounting Interface M6 threaded holes and 8-32 threaded holes M3 and M6 threaded holes M3 and M6 threaded holes and M4 threaded center hole M3 threaded holes Vacuum Compatible No No No No Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C Stage Parallelism < 100 µm < 10 µm < 25 µm RoHS Compliant Yes Yes Yes Yes CE Compliant Yes Yes Yes Yes Tranvel Range 75 ~ 600 mm 25 ~ 200 mm 25.4 ~ 203.2 mm 25.4 ~ 203.2 mm Accuracy 15 ~ 150 um 8 ~ 60 um 8 ~ 61 um 50 ~ 225 um Maximum Speed 42 ~ 1,000 mm/s 25 ~ 100 mm/s 26 ~ 104 mm/s 65 mm/s Maximum Continuous Thrust 18 ~ 100 N 25 N 25 N 25 N - Motorized Stage
Cat. No. Model Description M01-680-350 LSM025A-T4-MC04 Motorized linear stage, 25 mm travel (controller required) M01-680-355 LSM050A-T4-MC04 Motorized linear stage, 50 mm travel (controller required) M01-680-360 LSM100A-T4-MC04 Motorized linear stage, 100 mm travel (controller required) M01-680-365 LSM150A-T4-MC04 Motorized linear stage, 150 mm travel (controller required) M01-680-370 LSM200A-T4-MC04 Motorized linear stage, 200 mm travel (controller required) M01-680-375 LST0250A-T3-MC03 Motorized linear stage, 250 mm travel, fine resolution, low speed M01-680-380 LST0500A-T3-MC03 Motorized linear stage, 500 mm travel, fine resolution, low speed M01-680-385 LST0750A-T3-MC03 Motorized linear stage, 750 mm travel, fine resolution, low speed M01-680-390 LST1000A-T3-MC03 Motorized linear stage, 1000 mm travel, fine resolution, low speed M01-680-395 LST1500A-T3-MC03 Motorized linear stage, 1500 mm travel, fine resolution, low speed M01-680-400 LSA10A-T4-MC04 Motorized linear stage, 10 mm travel (controller required) M01-680-405 LSA25A-T4-MC04 Motorized linear stage, 25 mm travel (controller required) - Motorized Stage Specification
Specification Value Value Value Model LSM series LST series LSA series Feature Miniature motorized linear stages High-load, motorized linear stages Micro motorized linear stages Built-in Controller No No No Recommended Controller X-MCB1 (48 V) Recommended X-MCB1 (48 V) Recommended X-MCB1 (48 V) Recommended Encoder Type None None None Maximum Centered Load 100 N 1000 N Maximum Cantilever Load 300 N-cm 3000 N-cm Guide Type Needle roller bearing Roller bearing Ball bearing Vertical Runout < 8 µm < 13 µm < 4 µm Horizontal Runout < 12 µm < 13 µm < 13 µm Motor Steps Per Rev 200 200 200 Motor Type Stepper (2 phase) Stepper (2 phase) Stepper (2 phase) Motor Rated Current 600 mA/phase 2100 mA/phase 240 mA/phase Inductance 3.5 mH/phase 6.4 mH/phase 5 mH/phase Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw Mounting Interface M3 and M6 threaded holes and M4 threaded center hole M6 and M3 threaded holes M2 and M3 threaded holes and M4 threaded centre hole Limit or Home Sensing Magnetic hall sensor Magnetic home sensor Magnetic hall sensor Vacuum Compatible No No Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C RoHS Compliant Yes Yes Yes CE Compliant Yes Yes Yes Tranvel Range 25.4 ~ 203.2 mm 254 ~ 1500 mm 10 or 25 mm Accuracy 8 ~ 61 um 63 ~ 375 um 18 or 24 um Maximum Speed 26 ~ 104 mm/s 22 ~ 420 mm/s 10 mm/s Maximum Continuous Thrust 25 N 80 ~ 560 N 25 N